Intelligent Metrology Systems

Welcome to the Lab for Intelligent Metrology Systems at the University of Cincinnati. Our lab is devoted to advancing multidisciplinary research that converges data science with cutting-edge sensing and metrology technologies. Our goal is to propel the next generation of metrology systems with enhanced intelligence and autonomy. Our primary focus lies in the realms of smart manufacturing and biomedical applications, where we strive to push the boundaries of innovation.

Featured
A Novel Method for Deposit Accumulation Assessment in Dry Etching Chamber
A Novel Method for Deposit Accumulation Assessment in Dry Etching Chamber

Semiconductor Manufacturing | Semiconductor Dry Etching | Smart Manufacturing

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A Novel Quality Clustering Methodology on Fab-wide Wafer Map Images in Semiconductor Manufacturing
A Novel Quality Clustering Methodology on Fab-wide Wafer Map Images in Semiconductor Manufacturing

Semiconductor Manufacturing | Wafer Map | Smart Manufacturing | Dynamic Clustering | Rotation-Invariant Feature Extraction

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Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks
Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks

Semiconductor Manufacturing | Quality Control | Smart Manufacturing | Chemical Mechanical Polishing

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Detection and Diagnosis of Bottle Capping Failures based on Motor Current Signals
Detection and Diagnosis of Bottle Capping Failures based on Motor Current Signals

Fault Detection and Diagnosis | Quality Control | Intelligent Systems | Smart Manufacturing

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A Machine Vision Based Monitoring System for LCD Panel Cutting Wheel Degradation Assessment
A Machine Vision Based Monitoring System for LCD Panel Cutting Wheel Degradation Assessment

Machine Vision | Tool Wear Monitoring | Intelligent Maintenance | LCD Panel Cutting

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Deep Learning Aided Scalable Solution for Degradation Assessment of Bandsaw Machine
Deep Learning Aided Scalable Solution for Degradation Assessment of Bandsaw Machine

Bandsaw Machine Prognosis | Intelligent Maintenance | Cost Reduction | Industry 4.0

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