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Data Quality and Usability Assessment Methodology for Prognostics and Health Management: A Systematic Framework

May 3
Written by Jia Xiaodong

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Data Quality AssessmentPrognostics and Health Management
Jia Xiaodong
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Enhanced data-driven virtual metrology on chemical planarization process using dual Kalman filter

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A Novel Method for Deposit Accumulation Assessment in Dry Etching Chamber

Center for Intelligent Metrology & Sensing
Baldwin Hall 563A
University of Cincinnati
Cincinnati, OH 45221