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Center for Intelligent Metrology & Sensing
Home
Research
Overview
Publications
Project List
Posters
Our team
Videos
TechDemo
Contacts
Login Account
Home
Folder: Research
Back
Overview
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Folder: Videos
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Enhanced data-driven virtual metrology on chemical planarization process using dual Kalman filter
Jia Xiaodong 6/13/24 Jia Xiaodong 6/13/24

Enhanced data-driven virtual metrology on chemical planarization process using dual Kalman filter

Virtual Metrology for Semiconductor Manufacturing

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Center for Intelligent Metrology & Sensing
Baldwin Hall 563A
University of Cincinnati
Cincinnati, OH 45221