Enhanced data-driven virtual metrology on chemical planarization process using dual Kalman filter

Enhanced data-driven virtual metrology on chemical planarization process using dual Kalman filter

Jia Xiaodong 6/13/24 Jia Xiaodong 6/13/24

Enhanced data-driven virtual metrology on chemical planarization process using dual Kalman filter

Virtual Metrology for Semiconductor Manufacturing

A Novel Method for Deposit Accumulation Assessment in Dry Etching Chamber

Jia Xiaodong 4/26/24 Jia Xiaodong 4/26/24

A Novel Method for Deposit Accumulation Assessment in Dry Etching Chamber

Semiconductor Manufacturing | Semiconductor Dry Etching | Smart Manufacturing

A Novel Quality Clustering Methodology on Fab-wide Wafer Map Images in Semiconductor Manufacturing

Jia Xiaodong 3/26/24 Jia Xiaodong 3/26/24

A Novel Quality Clustering Methodology on Fab-wide Wafer Map Images in Semiconductor Manufacturing

Semiconductor Manufacturing | Wafer Map | Smart Manufacturing | Dynamic Clustering | Rotation-Invariant Feature Extraction

Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks

Jia Xiaodong 3/19/24 Jia Xiaodong 3/19/24

Adaptive virtual metrology for semiconductor chemical mechanical planarization process using GMDH-type polynomial neural networks

Semiconductor Manufacturing | Quality Control | Smart Manufacturing | Chemical Mechanical Polishing